|
|
SU8010 |
SU8020 |
SU8030 |
SU8040 |
| Secondary Electron Image Resolution |
1.0 nm (Vacc 15 kV, WD=4 mm)(*1)
1.3 nm (landing voltage 1kV, WD=1.5 mm)(*1) |
| Mag |
Low mag mode |
20-2,000x (Magnifi cation on Photo)(*2) |
| 80-5,000x (Magnifi cation on display)(*3) |
| High mag mode |
100-800,000x (Magnifi cation on Photo)(*2) |
80-800,000x (Magnifi cation on Photo)(*2) |
| 400-2,000,000x (Magnifi cation on display)(*3) |
300-2,000,000x (Magnifi cation onisplay)(*3) |
| Electron Optics |
Electron gun |
Cold cathode field emission source |
| Accelerating voltage |
0.5 kV to 30 kV (Standard mode) |
| Landing voltage |
0.1 kV to 2.0 kV (Deceleration mode) |
| Objective lens aperture |
Objective aperture (Heating type), 4openings, selectable from outside of vacuum |
| Electrical Image Shift |
±12µm (WD=8 mm) |
| Specime Stage |
Stage Control |
3-axis motor drive
5-axis motor drive(*4) |
5-axis motor drive |
5-axis motor drive (Regulus Stage) |
| Traverse range |
X |
0 - 50 mm |
0 - 110 mm |
| Y |
0 - 50 mm |
0 - 110 mm |
0 - 80 mm |
| R |
360° |
| T |
-5 - 7° |
| Z |
1.5 - 30 mm |
1.5 - 40 mm |
| Max. sample size |
100 mm dia. (Maximum) |
150 mm dia. (Maximum) |
| 150 mm dia.(*4) |
200 mm dia.(*4) |
- |
| Stage repeatability |
- |
- |
- |
less than ±0.5µm |
| Detector |
Secondary electron detector |
Lower/Upper |
Lower/Upper/Top |
| SE/BSE Signal Mixing Function (Upper detector) |
| Backscattered Electron Detector |
Semiconductor type BSED(*4) |
| YAG BSED(*4) |
| Transmission Electron Detector |
STEM detector (for BF-STEM)(*4) |
| BF-STEM aperture(*4) |
| DF-STEM holder(*4) |
| Other |
Energy dispersive X-ray spectrometer(*4) |
| Faraday cup(*4) |
| EBIC image observation unit(*4) |
